发明名称 METHOD OF LIFT-OFF MICROSTRUCTURING DEPOSITION MATERIAL ON A SUBSTRATE, SUBSTRATES OBTAINABLE BY THE METHOD, AND USE THEREOF
摘要 <p>Methods and apparatus for lift-off microstructuring deposition material, here alternate hydrophilic (601) and hydrophobic (602) letters, on a substrate; a method comprising deposition of polymeric material by plasma polymerisation deposition of monomers of substituted benzenes, (halo)aliphatic compounds, or a combination thereof; another method comprising deposition of polymeric material by plasma polymerisation deposition of monomers of vinyls, substituted vinyls, acrylics, silanes, and phosphites, or a combination thereof; still another method comprising deposition of polymeric material by plasma polymerisation deposition of monomers wherein said plasma is generated by a multiple phase AC supply, or DC supply; and substrates and devices prepared by lift-off microstructuring using plasma polymerisation deposition of monomers according to such methods. Scale A indicates about 100 ν.</p>
申请公布号 WO2002095497(A2) 申请公布日期 2002.11.28
申请号 DK2002000274 申请日期 2002.04.25
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