SCANNING PROBING MICROSCOPE COMBINED WITH INVERTED OPTICAL MICROSCOPE

摘要

The inventive scanning probing microscope combined with an inverted optical microscope comprises a base (1), a piezoscanner (7), an object holder (2) provided with an object (3) disposed in such a way that it is enable to interact with a probing device (5). Said probing device is coupled with an analysis unit (8) and an optical observing system which is optically coupled with the object and a light (14). The inventive microscope also comprises a unit (4) for moving the probing device (5) closer to the object (3) which interacts with the base (1). A first mirror (9) is incorporated into said unit (4), optically coupled with the object (3) and fixed to the analysis unit (8) which is arranged on the unit (4) for moving the probing device (5) closer to the object (3) in such a way that it is demountable. A second mirror (10) is optically coupled with the object by means of the first mirror (9) and arranged on the unit (4) for moving the object (3) closer to the probing device (5). The lighting device comprises the light source (14) and a capacitor (11) which are optically coupled with the object (3). The object holder (2) provided with the object is arranged on the base (1). The probing device (5) is fixed to the piezoscanner (7) arranged on the unit (4) for moving the object (3) closer to the probing device (5). The optical observing system is disposed on the side of the object oppositely in relation to the side of the probing device (5).