COOLING MECHANISM WITH COOLANT,AND TREATMENT DEVICE WITH COOLING MECHANISM

摘要

A treatment device (22), comprising a shower head (36) for leading treatment gas into a treatment container (4), a heater (46) for raising the temperature of the shower head, main flow passages (50, 52, 54) for coolant (C) having cooling passages (50) passing the shower head, a bypass flow passage (56) connected to the main flow passages so as to bypass the shower head, and a coolant control system for controlling the flow of the coolant by stop valves (V1, V2, V3) and a valve controller (58) for controlling the stop valves, wherein the coolant control system controls the flow of the coolant so as to stop the flow of the coolant in the cooling passage (50) when the temperature of the shower head is increased and to flow the coolant to both the coolant flow passage (50) and the bypass flow passage (56) when the temperature of the shower head is lowered.