| 摘要 |
A thermosensitive flow rate sensor includes a detecting element, in which a heating element and a fluid temperature detector are formed so as to be separated from each other on a surface of a flat substrate and a flow rate detection diaphragm is formed under a region where the heating element is formed, and a support having a recess portion, the detecting element being housed inside the recess portion such that a surface of the detecting element is positioned generally in a common plane with a surface of the support and such that a direction of alignment of the heating element and the fluid temperature detector is perpendicular to a direction of flow of a fluid being measured, and a groove being formed in the support so as to pass under a region where the fluid temperature detector is formed in the direction of flow of the fluid being measured.
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