| 摘要 |
<p>A laser machining apparatus has a clamping electrode (17) provided near the laser machining position and a capacitance sensing electrode (18) around the clamping electrode (17). While applying a voltage between the clamping electrode (17) and a work (15), the capacitance (C) between the capacitance sensing electrode (18) and the work (15) is measured, and the focal point (12a) of a laser beam (12) is controlled in accordance with the measured capacitance (C).</p> |
