Test station for polishing head of chemical-mechanical polishing arrangement has indicator showing status representing reliability of polishing head

摘要

The test station has a base element, a head adapter, a fluid line connected to a source of fluid under pressure and a vacuum source, whereby the fluid line can be connected to the polishing head to apply a raised pressure vacuum to the head. An indicator indicates a status representing the reliability of the polishing head. A wafer loss sensor test element receives a signal from a wafer loss sensor of the polishing head under test. AN Independent claim is also included for the following: a method of assessing the reliability of a polishing head.