| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of a large configuration in a conventional sealed pump device using a diaphragm. SOLUTION: The configuration of the sealed pump device can be miniaturized by arranging a driving mechanism 10 in a space between opposing pistons 8. Since it has a structure arranging the driving mechanism 10 in an interior of a separated space 13 formed in an interior of a first bellows 12, there is no inconvenience of lubricant or sliding powder produced by an operation of the driving mechanism 10 or the like mixing into fluid. In other words, the fluid is not contaminated by a operation powder or the like and the configuration of the sealed pump device can be miniaturized. Since the pistons 8 are supported by a driving shaft 16 inside a second separated space 28 separated by a second bellows 27, and a fine clearance is maintained between a cylinder 6 and the pistons 8, no sliding powder is produced between the cylinder 6 and the pistons 8, and the fluid is not contaminated. |
