WAVEGUIDE TYPE OPTICAL PARTS WITH THIN-FILM HEATER AND MANUFACTURING METHOD FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide waveguide type optical parts with thin-film heaters having the long life of the thin-film heaters and a method of manufacturing for the same. SOLUTION: Since the thin-film heaters 40 consists of a three-layered structure of a silicon nitride film 8-1/tantalum nitride film 9/silicon nitride film 8-2, oxygen and moisture are prevented from being incorporated the tantalum nitride film 9 and the waveguide type optical parts with the thin-film heaters having the long life of the thin-film heaters 40 are obtained.