SCANNING TYPE PROBE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To perform observation utilizing proximity field light and observation utilizing a principle similar to AFM and STM for one microsample with high accuracy. SOLUTION: The scanning type probe 1 has such a structure as an aperture type probe 6 and a protrusion type probe 7 are integrated and juxtaposed. Since the scanning type probe 1 can be moved slightly by means of a piezoelectric element, or the like, positional reproducibility is enhanced. More specifically, observation can be performed using the protrusion type probe 7 by moving the scanning type probe 1 slightly following observation using the aperture type probe 6, for example.