FLUORESCENT X-RAY ANALYZING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzing device capable of obtaining the stable fluorescent X-ray intensity even if rugged parts exist in a sample surface. SOLUTION: Shape of an opening part 3 of a primary X-ray diaphragm 3 is set so that a change of the intensity of the fluorescent X-ray 7 to be measured by a detecting means 8 is restricted at 1% or less when height of the sample surface 5a in relation to an X-ray source 1 and the detecting means 8 is changed at 1 mm as the maximum.