SILICA MESO-STRUCTURE THIN FILM, MESO-POROUS SILICA THIN FILM, METHOD FOR FORMING SILICA MESO-STRUCTURE THIN FILM AND METHOD FOR FORMING MESO-POROUS SILICA THIN FILM

摘要

PROBLEM TO BE SOLVED: To propose a silica meso-structure thin film and a meso-porous silica thin film, which are each formed on an optional substrate and has orientation. SOLUTION: The silica meso-structure thin film is formed on a high molecular compound film provided on the substrate and is formed on a part or the whole of high molecular compound film having a surface, on which structural anisotropy is given by the irradiation with linearly polarized light. The meso- porous silica thin film is formed by removing a surfactant from the fine pores of the meso-structure and is composed of hollow structural fine pores.