发明名称 |
PAD DESIGNS AND STRUCTURES FOR A VERSATILE MATERIALS PROCESSING APPARATUS |
摘要 |
<p>An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate is provided. It includes a rigid member having a top surface of a predetermined shape and a bottom surface. The rigid member contains a plurality of channels, each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough. A pad is attached to the rigid member via a fastener. The pad also allows for electrolyte and electric field flow therethrough to the substrate.</p> |
申请公布号 |
EP1259661(A1) |
申请公布日期 |
2002.11.27 |
申请号 |
EP20000975526 |
申请日期 |
2000.11.01 |
申请人 |
NU TOOL INC. |
发明人 |
UZOH, CYPRIAN;BASOL, BULENT;TALIEH, HOMAYOUN |
分类号 |
C25D5/22;B23H5/08;B24B37/26;C25D7/12;C25D17/00;C25F7/00;(IPC1-7):C25D17/00 |
主分类号 |
C25D5/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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