| 摘要 |
PROBLEM TO BE SOLVED: To inhibit the increase in manufacturing costs caused by the failures in a calibration circuit. SOLUTION: In the sensor apparatus for detecting a fine shape, the amount of electricity that changes according to a fine shape to be detected is detected by a detection element 1, and sensor cells 11 for outputting a signal, in response to the amount of electricity from a sensor circuit 2, are arranged two- dimensionally for detecting the irregularities of the fine shape. In the sensor apparatus, a test circuit 8 for inspecting the operation of a calibration circuit 3 is provided for each sensor cell 11, and detection sensitivity is adjusted across the board for each sensor circuit 2, based on a test circuit control signal 5A. |
