| 摘要 |
PROBLEM TO BE SOLVED: To improve detection precision by suppressing unnecessary vibration of a vibrating body which is not based on an angular speed to be detected and suppressing noise generated in a detection signal. SOLUTION: A detection vibrating body 19 is vibratingly supported by a second support beam 27 in Y-direction for four exciting vibration bodies 15-18 supported vibratingly by a first support beam 26 on a substrate 14, respectively. The excitation vibrating bodies 15, 18 are arranged on both sides on one of both diagonal directions for the detection vibrating body 19, and the excitation vibrating bodies 16, 17 are arranged on both the other sides. Both the vibrating bodies 16, 17 are excited to be vibrated at larger amplitude for both the vibrating bodies 15, 18, and the detection vibrating body 19 is added in an X-direction to be vibrated in the Y-direction. The vibration in the Y-direction reduces unnecessary leak vibration in the Y-direction of the detection vibrating body 19 generated due to leaking of drive signal applied on excitation fixing electrodes 20-22 to the detection side by a parasite capacity. |
