| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular speed sensor capable of relieving the load of inspection adjustment man-hours and suitably adjusting each sensitivities for an angular speed of a paired vibrator. SOLUTION: Second vibrators 12, 22 form a pair which are mutually substantially symmetrical and are floating-supported to a substrate 10. The second vibrators 12, 22 are vibrated in the mutually reverse direction to y-direction, in response to the Coriolis force on the basis of the same angular speed by applying the angular speed about z-axis, in a state of their being vibrated and driven in the mutually reverse direction to the x-direction together with first vibrators 11, 21. The angular speeds are detected on the basis of vibration amplitude of the y-direction of the second vibrators 12, 22. A plurality of regulation electrodes, fixed and arranged on the substrate 10, facing the second vibrators 12, 22 respectively, for regulating resonant frequencies in the y- direction of the second vibrators 12, 22 are provided by applying a direct current voltage. |
