| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a gas sensor element having superior durability and hard to be deformed, and a tool for a vacuum chuck used in it. SOLUTION: According to this manufacturing method, in manufacturing the gas sensor element 1 constituted by stacking a plurality of ceramic plates including a solid electrolyte plate 13 having an electrode, raw sheets for each ceramic plate are prepared, and every two raw sheets for each ceramic plate is positioned, and stacked and bonded with a vacuum chuck by an adhesive to manufacture an unburnt layered product formed by a desired number of raw sheets for the ceramic plates. After that, the unburnt layered product is burnt. The tool for a vacuum chuck is used in the method. |
