| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve productivity of a ridge type optical waveguide, to improve the stability of its optical characteristics and the stability of its shape, to prevent a process degenerating layer on the surface of the optical waveguide, and to control the angle of the flank of the ridge type optical waveguide to the main surface of a substrate. SOLUTION: In a method for manufacturing an optical waveguide device equipped with a substrate 1 and the ridge type optical waveguide 3 projecting on the main surface 1a of the substrate 1, the optical waveguide device is a second higher harmonic generating device and the ridge type optical waveguide has a dummy phase matching type cyclic polarization inversion structure and is formed by an abrasion processing method. Light having <=350 nm wavelength is preferably used as the light source for the abrasion processing and light having 150 to 300 nm wavelength is more preferably used.</p> |
