| 摘要 |
<p>PROBLEM TO BE SOLVED: To decrease such an abnormality in machining as a dog ear when a groove to be machined having a V-shaped section one side of which is nearly vertical is machined with a laser beam while relatively moving two masks. SOLUTION: Two masks 23 and 24 are laminated and an object 33 to be machined is irradiated with the laser beam 34 through an opening pattern 32 for machining formed with the overlap of openings 30 and 31 of both masks 23 and 24. In this case, the machining is started from the state that the width of irradiation region with the laser beam 34 is equal to the width of a groove 5 to be machined, the width of the opening pattern 32 for machining is gradually narrowed, and the irradiation with the laser beam 34 is stopped before the opening pattern 32 for machining is completely closed.</p> |
