| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for supporting an object to be processed, capable of mounting the object to be processed in a horizontal state and reducing contact resistance when moving. SOLUTION: This device for supporting the object to be processed, which is used in a processing unit equipped with a stationary table 46 to fix a substrate 51, a mobile mechanism to move the stationary table 46, and a probe head 53 to apply a processing to the substrate 51 fixed to the stationary table 46, is provided with substrates 34a, 34b having a horizontally formed top surface, shafts 37b, 37c disposed on the substrates 34a, 34b, and a pair of slender shafts 47 positioned so as to cross the shafts 37b, 37c on both sides of the lower surface of a base 45 disposed on the shafts 37b, 37c.
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