发明名称 APPEARANCE INSPECTION DEVICE AND APPEARANCE INSPECTION METHOD BY IMAGE RECOGNITION
摘要 PROBLEM TO BE SOLVED: To provide an appearance inspection device and an appearance inspection method capable of performing quality determination of appearance images of all inspection objects at high speed with a stable tact time without moving an alignment plate loaded with the inspection objects. SOLUTION: This device has an image data taking means 101 for taking collectively all the plural inspection objects arranged in a line as single whole image data, an image data cutout means 102 for cutting out image data of each inspection object from the taken image data, an image quality determination means 103 for executing quality determination by image recognition by comparing the cut-out image data with reference image data stored beforehand in a parameter storage part 105, and an image data storage part 104 for storing the whole image data, the cut-out individual image data and a result of the quality determination. The device can be simplified, and performance deterioration of the inspection objects can be suppressed, and accuracy of the quality determination can be heightened, by taking the image data collectively.
申请公布号 JP2002340812(A) 申请公布日期 2002.11.27
申请号 JP20010141310 申请日期 2001.05.11
申请人 NEC CORP 发明人 OGASAWARA TADAYUKI
分类号 G01B11/24;G01N21/956;G06T1/00;H01L21/66 主分类号 G01B11/24
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