| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a manufacturing method for an active matrix substrate used for an active matrix type liquid crystal display device. SOLUTION: On a substrate, a pixel part including a thin-film transistor as a switch and a peripheral circuit part constituted including a thin-film transistor are formed, and the thin-film transistor of the pixel part has an LDD structure. This manufacturing method for the active matrix substrate has a process of implanting ions to low density by using the gate electrode as a mask to anodize the gate electrode and further implanting ions to higher density.</p> |
