发明名称 |
ALICYCLIC-HYDROCARBON-BACKBONE-CONTAINING COMPOUND, ALICYCLIC-HYDROCARBON-BACKBONE-CONTAINING POLYMER, AND RADIATION-SENSITIVE RESIN COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a novel alicyclic-hydrocarbon-backbone-containing compound having a polymerization activity, an alicyclic-hydrocarbon-backbone- containing polymer, and a radiation-sensitive resin composition. SOLUTION: This alicyclic-hydrocarbon-backbone-containing compound is represented by formula (1) (wherein R1 is a group having an alicyclic hydrocarbon backbone and has 4-20 carbon atoms; and R2 and R3 are each H or a 1-3C alkyl). The alicyclic-hydrocarbon-backbone-containing resin has repeating units derived from the compound represented by formula (1), is hardly alkali-soluble, has acid-dissociable groups, and becomes alkali-soluble when the acid-dissociable groups are dissociated by the action of an acid. The radiation-sensitive resin composition contains the resin and a radiation-sensitive acid generator. |
申请公布号 |
JP2002338629(A) |
申请公布日期 |
2002.11.27 |
申请号 |
JP20010143899 |
申请日期 |
2001.05.14 |
申请人 |
JSR CORP |
发明人 |
TAKAO YASUYUKI;YAMAOKA TSUGIO;SOYANO AKIMASA;MURATA MAKOTO |
分类号 |
G03F7/039;C07C233/09;C08F20/52 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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