| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size and thickness of a sensor head compared with a conventional one by forming integrally a photoreceiving part and a light emitting part of the sensor head. SOLUTION: This photoelectric encoder is constituted of a scale 10 and the sensor head 20 arranged opposedly via a prescribed optical gap and movable each other along a measuring axis x-direction. Scale grids 12 are formed at a prescribed pitch on a scale substrate 11 extended along the measuring axis x-direction, in the scale 10. Luminescent elements 22 and photodiodes 23 facing the scale grids 12 are arranged alternately each other at a prescribed pitch on a sensor substrate 21, in the sensor head 20.
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