| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus, in which the position of the surface of a melt is measured with a high accuracy. SOLUTION: The single crystal pulling apparatus has a radiant heat shield 10 composed of an inverted truncated conical main body 10a provided at a single crystal pulling zone in a quartz crucible 1 capable of being raised and lowered by a lifter driving device 5 and a flange 10b integrally provided at the upper end part of the main body 10a and held at a required position, a position sensor 11 for the melt surface, composed of a float 11a floating on the surface 3a of the melt in the crucible 1 mentioned above and a fine rod 11b being vertically arranged in a standing condition on the float 11a, whose upper end part can freely ascend and descend through the flange 10b of the radiant heat shield 10 and protrudes from the flange 10b, and a measuring means for measuring the length of the part, protruded from the flange 10b of the fine rod 11b.
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