| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone supplying system which is able to increase the pressure for supplying ozone and keep the pressure of a gaseous raw material supplied to a ozone generator at the optimal value, and thereby, which is able to supply ozone efficiently and stably. SOLUTION: This ozone supplying system 100 has the ozone generator 1 for generating ozone from the gaseous raw material, a gaseous raw material supplying section 4 for supplying the gaseous raw material 2 being air or oxygen to the ozone generator 1 and an ozone supplying section 5 for supplying the ozone 3 generated at the ozone generator 1 to an objective section 6 in which the ozone is used. In the ozone supplying section 5, an ozone compressor 11 for increasing the pressure of the ozone generated at the ozone generator 1 and for supplying the ozone to the objective section 6 is provided, and further it is possible to control the flow amount of ozone so that the pressure of the gaseous raw material 2 supplied to the ozone generator 1 is kept at the optimal predetermined pressure when the pressure at the objective section 6 is changed. |
