| 摘要 |
PROBLEM TO BE SOLVED: To produce thin (e.g. <=200μm) miniature microlens arrays in a high yield. SOLUTION: Resist layers 12a-12c are formed on one principal surface of a substrate 10 of glass or the like and a pattern forming material layer 16 of alumina or the like is deposited by way of a sacrificial film 14 in such a way that concave parts 16a-16c corresponding to the layers 12a-12c are formed in the layer 16. The film 14 is removed to separate the layer 16 from the substrate 10 and the layer 16 is inverted and bonded to a substrate to obtain a pattern. A lens material layer of SiO2 or the like is deposited on the top of the pattern by way of a sacrificial film or the top of the pattern is coated with a lens material layer comprising a light transmissive resin to produce a microlens array and this microlens array is separated from the pattern. In another way, a lens material layer is deposited on the top of a substrate by way of a sacrificial film, lens convex parts are imparted by etching to the lens material layer to produce a microlens array and the sacrificial film is removed to separate the microlens array from the substrate. |
