| 摘要 |
PROBLEM TO BE SOLVED: To enhance the input efficiency of a laser beam into an optical waveguide in an optical waveguide device configured such that the laser beams which are emitted from semiconductor laser elements directly connected to respective incident ends of multi channel are multiplexed at optical waveguide branch and emitted from an emission port. SOLUTION: In the optical waveguide device that is composed by forming a branching optical waveguide on a substrate 1 and whose semiconductor laser elements are directly connected to respective incident ends of the branching optical waveguide, the branching optical waveguide has an ARROW-B structure in which a GaN second clad layer 3, Alz1 Ga1-z1 N first clad layer 4 having a refractive index smaller than that of the second clad layer 3, and a GaN core layer 5 having a refractive index larger than that of the Alz1 Ga1-z1 N first clad layer 4 are successively formed on a SiC substrate 1 in the above order. |
