| 摘要 |
PROBLEM TO BE SOLVED: To reduce the inert gas quantity to be blown for replacing oxygen in an irradiation part with the inert gas. SOLUTION: In this irradiation device 1, an electron beam 2 is generated in vacuum, and the electron beam 2 is taken out to the atmospheric air through an irradiation window 3, and an irradiation object 7 arranged on the irradiation part is irradiated. The device is equipped with atmospheric gas blowout holes 21, 22 for forming air curtains 23, 24 outside the irradiation part 8 by blowing out the gas, and an injection nozzle 5 for removing oxygen existing in the irradiation part 8 to the outside of the irradiation part 8 through the air curtains 23, 24 by blowing the inert gas 9 into the irradiation part 8, to thereby replace the irradiation part 8 into an inert gas atmosphere.
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