| 摘要 |
PROBLEM TO BE SOLVED: To measure the frequency characteristics and level (power) characteristics of a semiconductor device at high speed. SOLUTION: A data processor 25 for processing a signal from the semiconductor device DUT to be detected by a detector 24 comprises the data processor 25 provided with a plurality of pairs of A/D converter 30 for acquiring a detection signal and converting it into digital data and processors 31 for performing signal processing on the digital data converted by the A/D convertors 30. When the signal from the semiconductor device DUT is processed, an A/D converter switching means 26 is controlled in such a way as to selectively switch to any one A/D converter 30 by a control signal from a processing device 2 to parallelly process data acquisition from the detecter 24 by the A/D converter 30 and signal processing by the data processor 31 which forms a pair with the A/D converter 30.
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