MODULATION REFLECTION SPECTROMETRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a modulation reflection spectrometric device capable of significantly shortening the measurement time. SOLUTION: This modulation reflection spectrometric device 110 is characterized in that it is provided with irradiation means 136 for applying the white inspection light 116 from a light source 112 to a sample 118; a modulation means 138 for applying an externally modulated light 128 to the sample 118 in superposition with the inspection light 116 at a prescribed timing to modulate the surface electric field natural to the sample; a spectrally dividing means 140 for spectrally dividing the reflected light 120 from the sample 118 to each wavelength light of a specified region and simultaneously taking out each wavelength light; a multi-channel detection means 142 for simultaneously detecting each wavelength light; and a signal processing means 144 for obtaining spectrum information reflecting the electronic energy structure of the sample on the basis of the differential signal between the superposed radiation of the external modulated light 128 and the inspection light 116 to the sample 118 and the irradiation with only the inspection light 116.