发明名称 |
Process for producing semiconductor integrated circuit device and semiconductor integrated circuit device |
摘要 |
In a light oxidation technique for a CMOS LSI employing a polymetal gate structure and a dual gate structure, both oxidation of a refractory metal film constituting a part of a gate electrode, and diffusion of boron contained in a p-type polycrystalline silicon film constituting a part of the gate electrode can be prevented. A mixed gas containing a hydrogen gas and steam synthesized from an oxygen gas and a hydrogen gas is supplied to a major surface of a semiconductor wafer A1. A heat treatment for improving a profile of a gate insulating film that has been cut by etching under an edge part of the gate electrode is conducted under a low thermal load condition in which the refractory metal film is substantially not oxidized, and boron contained in a p-type polycrystalline silicon film constituting a part of the gate electrode is not diffused to the semiconductor substrate through the gate oxide film. <IMAGE> <IMAGE> |
申请公布号 |
EP0964437(A3) |
申请公布日期 |
2002.11.27 |
申请号 |
EP19990303683 |
申请日期 |
1999.05.10 |
申请人 |
HITACHI, LTD. |
发明人 |
TANABE, YOSHIKAZU;YAMAMOTO, NAOKI;MITANI, SHINICHIRO;HANAOKA, YUKO |
分类号 |
H01L29/78;H01L21/00;H01L21/28;H01L21/316;H01L21/321;H01L21/8234;H01L21/8238;H01L27/088;H01L29/49 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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