| 摘要 |
PROBLEM TO BE SOLVED: To provide a niobium oxide sintered compact which is dense, is excellent in mechanical strength and can be suitably used as a sputtering target, in particular. SOLUTION: In the niobium oxide sintered compact, content of niobium oxide is >=99.9 wt.%, relative density is >=90% and average crystal grain size is 5 to 20 μm. |
