| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of acquiring high electron beam output, and heightening reliability. SOLUTION: This device has a vacuum shell 13 having a blocked base end part 13a and an opened top part 13b, a negative electrode 3 arranged close to an inward base end part 13a of the vacuum shell 13, a circular positive electrode 4 arranged close to an inward tip part 13b of the vacuum shell 13, roughly coaxially with the vacuum shell 13, a high voltage power supply 5 connected to the negative electrode 3 and the positive electrode 4, and a vacuum pump 8 connected to the vacuum shell 13. An external cylinder 14 is installed elongatively on the front side of the tip part 13b of the vacuum shell 13, and partition plates 16 having small holes 15 on the axial center of the vacuum shell 13 are installed at required intervals in the axial direction inside the external cylinder 14, to thereby form plural vacuum chambers 17. Exhaust pumps 18 are connected to each vacuum chamber 17, and the degree of vacuum is heightened successively from the vacuum chamber 17 on the front end side toward the vacuum shell 13 side by operation of the exhaust pumps 18.
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