发明名称 SEMICONDUCTOR ION SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To prevent a sealing resin from covering an ion sensitive part to impair a sensor function, and to simplify the mounting work process for it. SOLUTION: A frame part 11 is bonded to the surface side of a sensor chip A. The frame part 11 is formed of metal or synthetic resin like a cylinder having an opening part 11a, the diameter of which is not smaller than the ion sensitive part 6, and bonded to the sensor chip A with the ion sensitive part 6 facing to the opening part 11a. Accordingly, when the region outside the ion sensitive part 6 is sealed with sealing resin 23, the sealing resin 23 can be inhibited from flowing into the ion sensitive part 6 by the frame part 11 without a special device for covering the ion sensitive part 6, the sealing resin 23 can be prevented from covering the ion sensitive part 6 to impair the sensor function, the mounting work process for it can be simplified, and lowering of yield can be prevented.
申请公布号 JP2002340849(A) 申请公布日期 2002.11.27
申请号 JP20010145524 申请日期 2001.05.15
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 ARII YASUTAKA;SAKAI ATSUSHI;SUGIURA YOSHIYUKI;SAITO HIROSHI;YAMAMOTO MASAHIRO
分类号 G01N27/414;H01L21/56 主分类号 G01N27/414
代理机构 代理人
主权项
地址