APPLIED ELECTRODE TEMPERATURE ADJUSTING DEVICE OF PLASMA CVD APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an applied electrode temperature adjusting device capable of reducing accidents caused by an electric leak and eliminating power losses in a plasma CVD apparatus. SOLUTION: In the applied electrode temperature adjusting device of the plasma CVD apparatus, a temperature-adjusting liquid-contact part of the electrode is covered by an electric insulating material.