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发明名称
Semiconductor structures and devices utilizing a compliant substrate
摘要
申请公布号
AU2002246857(A1)
申请公布日期
2002.11.25
申请号
AU20020246857
申请日期
2001.12.20
申请人
MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE
发明人
ALEXANDER A. DEMKOV;JAMAL RAMDANI;LYNDEE L. HILT
分类号
H01L21/205;C30B25/18;H01L21/20;H01L21/36;(IPC1-7):C30B25/18
主分类号
H01L21/205
代理机构
代理人
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