| 摘要 |
PURPOSE: To improve the processing efficiency and improve yield by performing the monitoring the set condition of a container for accommodating a workpieces and the monitoring of the operation of a carriage means which selects and takes out the workpieces within the container. CONSTITUTION: In a processor equipped with a container 6, which accommodates a plurality of workpieces, for example, semiconductor wafers, a carriage mechanism 4, which carries a selected and specified semiconductor wafer W in and out of this container 6, and a processor 3, which applies proper processing to the semiconductor wafer, a cassette sensor 7, which detects the existence of the container 6, and a CPU 8, which is driven based on the signal from this cassette sensor 7, are provided. In case that there is no container 6, an alarm 9 indicates the condition, and the container 6 is set in the specified position, based on the alarm indication, and then the semiconductor wafer set within the container 6 is selected with a mapping sensor 18, and also the abnormal operation of the carriage mechanism 4 is detected, and the detection signal is transmitted to CPU 18. |
