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发明名称
摘要
申请公布号	JP3350628(B2)	申请公布日期	2002.11.25
申请号	JP19960214579	申请日期	1996.08.14
申请人		发明人
分类号	G01R31/26;H01L21/66;H01L21/8222;H01L21/8234;H01L21/8247;H01L21/8248;H01L27/06;H01L27/088;H01L27/115;H01L29/78;(IPC1-7):H01L21/822;H01L21/823;H01L21/824	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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