METHOD AND APPARATUS FOR GAS LEAKAGE TEST FOR GAS BOMBE CABINET SYSTEM

摘要

PURPOSE: A method and apparatus for gas leakage test is provided to prevent process error by automatically detecting gas leakage and preventing gas from entering the main facility. CONSTITUTION: A method for gas leakage test, comprises the steps of checking pressure of the gas entering the main facility from a gas bombe cabinet system which supplies gas to a semiconductor manufacturing system; warning gas leakage upon detection of the increase of pressure of gas; and preventing gas from entering the main facility. An apparatus for gas leakage test, comprises a pressure sensor(50) for detecting pressure of gas; a control unit(52) for generating warning sound when the pressure detected by the pressure sensor is higher than the previously detected pressure; and solenoid valves(60,62) arranged at the gas supply path, and which cut off gas supply in accordance with the control of the control unit, upon detection of gas leakage.