METHOD FOR PRODUCING ORGANIC THIN FILM ELEMENT

摘要

PURPOSE: To deposit an electrode film without roughening the surface of an organic film such as an organic EL(electroluminescence) film. CONSTITUTION: On the deposition of a negative electrode 5 on a light emission layer 4 as an organic EL film, a facing target sputtering system in which the front direction of each circumference of a pair of targets oppositely arranged at a prescribed interval is provided with a reflection electrode reflecting electrons, and further, in the vicinity of the peripheral part of each target, the parallel magnetic field having a part parallel to the face thereof is formed by a magnetic field generation means is used.