HORIZONTAL VARIABLE WAFER LOADING DEVICE OF SEMICONDUCTOR PRODUCTION FACILITY

摘要

PURPOSE: A horizontal variable wafer loading device of semiconductor production facility is provided to prevent a wafer breaking that is caused by align fail or pitch fail. CONSTITUTION: A cylinder and a shaft of it are installed inside a housing(10) and a transporting plate is connected to the shaft. Multiple slide buffers are placed on a transporting plate by a definite interval, supported by multiple interval supporting link. Two slots(26,28) in the buffer is prepared to load two wafers. Grooves(30) are formed on each side of slot. Each emission unit(32) and detection unit(34) of photo sensor are placed on the each side of upper part of the housing. When a wafer is not safely set in a buffer, light signal from the emission unit is intercepted by a wafer so that alarm signal is generated.