发明名称 METHOD OF MANUFACTURING ORGANIC EL DISPLAY
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL display having high manufacturing yield. SOLUTION: A pixel electrode, a first capacitor (C) electrode, a first/second source/drain (SD) electrode on a pixel region and a first/second type SD electrode on a non-pixel region are formed from a transparent material layer, and a first metal (M) layer on a substrate, a first/second semiconductor (S) layer between the first/second SD electrodes and a first/second S layer between the first and the second type SD electrodes are respectively formed and a first type gate electrode, a second 2C electrode and a first impurity shielding (IS) layer are formed from a second M layer deposited on all the surface of the substrate. Then, a first/second 2SD regions and a first type SD region are respectively formed on both the terminals of the first/second 2S layer and the first type S layer by ion implantation of a first conductive impurity (I), a second 2IS layer is formed on all the surface of the substrate, and a second type gate electrode is formed from one part of the first/second 2IS layer. Then, the second type SD regions are formed on both the terminals of the second type S layer by the ion implantation of a second conductive I, and an organic light-emitting layer is formed on the exposed part of the pixel electrode.
申请公布号 JP2002333846(A) 申请公布日期 2002.11.22
申请号 JP20020059218 申请日期 2002.03.05
申请人 SAMSUNG SDI CO LTD 发明人 CHO KONKO
分类号 H05B33/10;G09F9/00;G09F9/30;H01L21/336;H01L21/77;H01L21/8238;H01L21/84;H01L27/08;H01L27/092;H01L27/12;H01L27/32;H01L29/786;H01L51/50;H01L51/56;(IPC1-7):G09F9/30;H05B33/14;H01L21/823 主分类号 H05B33/10
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