OBJECTIVE LENS

摘要

PROBLEM TO BE SOLVED: To provide a cata-dioptric objective lens where deflection mirrors are mutually adjusted and supported accurately, and simultaneously to which high rigidity is given. SOLUTION: The cata-dioptric objective lens has at least two deflection mirrors 2 and 3 equipped with a plurality of reflection surfaces 2a and 3a positioned at a specified angle, especially, at 90 deg. to each other and a plurality of lenses. The deflection mirrors are disposed so that their reflection surfaces may be positioned on a common base member 1 whose position is set in the objective lens.