| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a nano-structure, in which anodically oxidized alumina nano-holes each having a nano-hole that has a bottom running through to reach a base electrode composed of a conductive metallic layer of the base and has excellent linearity and the uniformity of the diameter, are uniformly and stably formed. SOLUTION: The manufacturing method of the nano-structure, in which the anodically oxidized alumina nano-holes are formed on the base electrode comprising W as a principal ingredient and run through to reach the base electrode surface, has a process for forming a porous coating film having the alumina nano-holes by the anodic oxidation and successively a process for making the alumina nano-holes to run through to reach the base electrode by chemical etching. |
