GALVANOMETER CONTROLLER AND LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a galvanometer controller which can stably perform control without being affected by secular changes and ambient temperature and which has excellent operability and expandability and to provide a laser beam machining apparatus equipped with the controller. SOLUTION: The galvanometer controller which controls the direction of the laser beam reflection is provided with: a distortion correction part 9 for correcting the working distortion of a lens which constitutes a condensing optical system; an orthogonality correction part 10 which corrects the orthogonality between the two axes of the galvanometer, linearity correction parts 11a and 11b which correct the linearity of the two axes; and PID control blocks 12a and 12b which carryout PID control by using the signal from the position sensor provided to the galvanometer as a feedback signal. All of these parts and blocks consist of digital circuits. Stable control of the galvanometer controller is achieved and the operability and expandability of the controller are improved by providing a parameter table 15 which manages parameters from each of the correcting parts and the PID control blocks and performing management with a host controller 1.