发明名称 METHOD OF MANUFACTURING OPTICAL INFORMATION RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing optical recording media which is capable of forming the optical disk media of the number of the layers greater than the number of deposition chambers disposed in sputtering equipment provided with a plurality of the deposition chambers for forming arbitrary thin films and is extremely small in the variation of the recording and reproducing characteristics among the formed optical recording media when mass-producing the optical disk media. SOLUTION: This method has a case the base materials fed into the sputtering equipment pass the interior of all the deposition chamber within the sputtering equipment at least >=2 times and the thin films are formed on the base materials passing the interior of the deposition chamber in at least >=2 deposition chambers and the case the thin films are not formed, by which the formation of the optical recording media is made possible and when the optical recording media are mass-produced, the feeding of the base materials into the sputtering equipment is performed by the method of not continuously feeding the base materials.
申请公布号 JP2002334489(A) 申请公布日期 2002.11.22
申请号 JP20010139761 申请日期 2001.05.10
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KUSADA HIDEO;OSADA KENICHI
分类号 C23C14/34;C23C14/50;G11B7/26;(IPC1-7):G11B7/26 主分类号 C23C14/34
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