SUBSTRATE FOR DISPLAY PANEL, PRODUCTION METHOD THEREFOR, AND THIN FILM FORMING APPARATUS USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a display panel at a low cost. SOLUTION: The substrate for the display panel can be produced with high productivity by using a few masks. In the production of the substrate for display panel provided with an insulating substrate and elements fabricated by processing a plurality of conductive layers, insulation layers and semiconductor layers which are formed on the insulation substrate, the lowermost conductive layer out of the conductive layers is processed into a wiring element, the other conductive layers are electrically connected to the lowermost conduct layer. Further more, the conductive layers, insulation layers or semiconductor layers are selectively formed in predetermined regions, by using a shield for selectively covering the periphery of the insulation substrate, for example.