发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce the amount of increase in device pitch and channel width as much as possible, as compared with a general MOS transistor in a MOS transistor having high ESD breakdown withstand amount. SOLUTION: A trench region 21 is formed in a drain region 14 of the MOS transistor, the inside of the trench region 21 is filled with an insulator 22, and at the same time, the drain region 14 is extended along the surface of the trench region 21.
申请公布号 JP2002334990(A) 申请公布日期 2002.11.22
申请号 JP20010252563 申请日期 2001.08.23
申请人 FUJI ELECTRIC CO LTD 发明人 KITAMURA MUTSUMI;KITAMURA AKIO
分类号 H01L29/78;H01L29/06;(IPC1-7):H01L29/78 主分类号 H01L29/78
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