| 摘要 |
<p>PROBLEM TO BE SOLVED: To assemble on a single substrate resonators which have respectively resonance frequencies different from each other. SOLUTION: The method for manufacturing a resonator (140) on a substrate (132) includes a process for manufacturing a bottom-portion electrode (142) on the substrate (132), a process for creating a piezoelectric(PZ) layer (134) thereon, a process for creating a surface-electrode layer (136) thereon, a process for creating a surface loading layer (138) thereon, and a process for overetching the surface loading layer (138), so as to form a surface electrode (146+148) from the surface-loading layer (138) and the surface-electrode layer (136).</p> |
