MANUFACTURE OF DIELECTRIC CERAMIC COMPOSITION FOR LOW TEMPERATURE COFIRED MULTILAYER SUBSTRATES

摘要

PURPOSE: A dielectric ceramic composition of the MgO-CaO-TiO2(MCT) system is provided for use as low temperature fired multilayer substrates requiring excellent microwave dielectric characteristics and low temperature firing(<=1100 deg.C). CONSTITUTION: The manufacturing method of dielectric ceramic composition for low temperature cofired ceramic(LTCC) comprises the steps of; (i) ball-milling raw materials, MgO, CaO and TiO2, and calcining at 1100deg.C; (ii) adding 2-10%(based on the total amount of composition) of sintering aids such as boro silicate glass comprising B2O3 and SiO2, and at least one alkali oxide selected from BaO, ZnO and PbO to lower firing temperature and get good electric properties, where the firing aids are oxides containing BaO, B2O3 and SiO2 in a molar ratio of 30 : 60 : 10; (iii) forming; (iv) firing at 1050-1100deg.C. The resultant dielectric ceramic composition fired at 1100deg.C has the following microwave characteristics: dielectric constant of 20-21, Qf of 9100-11000 and near-zero temperature coefficient of resonant coefficient.